UHV-Polar Provider Weasel

The UHV polar provider Weasel is the newest development from the ASYS Mirconicfab ® program. This compact cluster arrangement is very suitable for substrate transports in the ultrahigh vacuum (UHV) region. A hermetic separation to all components afflicted with lubricants is guaranteed by its patented Foil-Technology (DE 10054045).

With this patented technology it is also possible to move products which react sensitively to hydrocarbons, free from contamination, in vacuum or in protective gas.

The possibility of heating the chamber is standardly integrated just as the automatic cover drive of the vacuum chamber including a back-up in case of a crash.

The preceding atmospheric handling module (EFEM) was designed specifically for a space and transport time-optimized connection to the Micronicfab ® vacuum chambers.In the EFEM a high performance Vario A LH robot with double paddle is responsible for all tasks of transportation.With the help of a two hand- gripper a cost-intensive linear axis could be omitted.

In the area in which the substrates move, the mini environment, a clean room category from up to ISO 1 can be achieved through the available laminar displacement current and special filters. Standardized HEPA and ULPA filter can be used as filter mats.

The introduction of the substrate into the handling module is carried out through the attachment of three FOUP load ports according to SEMI standard.Alternatively, other load ports which comply with the SEMI- BOLT-Interface standard, can be used (for example FOSB or SMIF modules). Unused ports can also be closed.

To ensure quick loading and unloading of the vacuum chamber specially developed vacuum sluices for 2 substrates, the ASYS Vacu-Locks, are employed.Each Vacu-Lock is equipped with a fixture for adjusting the substrate.The time for evacuating the loading chamber can be used for the adjustment and thus no Aligner is required in the EFEM.

The contact of the substrates occurs solely on the back and here too it takes place only in the boundary region. The contact material is a contamination-free Kalrez® Polymer suitable particularly for this application.

The entered maximum speeds and accelerations are converted in such a way that the substrate does not exceed these values at any point on its trajectory.

Both robots are operated in a course -optimized manner.The superordinate control only stipulates a transport from A to B. The controller then determines the optimal path between these two points. Predefined interfering edges are optimally by-passed during transport and can also not be touched in the service mode.

The plant can be operated via the SECS/GEM Protocol according to SEMI-NORM or via an OPC or PLC connection.High-level as well as low-level commands are possible.The entire control system,the transport module controller(TMC) are arranged easily accessible above the EFEM.The touch screen which is at eye-level and easy to read can display either customized information, e.g of the Clustertool-Controller (CTC) or also status messages of the Micronicfab®.The visually appealing signal light with integrated acoustic warning signal continues the principle of the avoidance of sharp edges and corners.

For easy installation and maintenance of the plant, a hand control device with touch screen and all necessary mechanical switches including an emergency stop switch are present. For optimal visual control, inspection glasses or more specifically, windows are attached at all important positions.