The micronicfab is a Network of robot based safety spheres for the production of micro structures.
You can start with 2 process-modules and scale it up to 10 modules and more. The MICRONICFAB design is based on a linear System, but available as a polar version as well.
The MICRONICFAB can be used as a high vacuum, ultrahigh vacuum or an overpressure system filled will an inert gas. So every possible handlings requirement in the Semiconductor, Compound-semiconductor, Flat panel, Photovoltaic or MEMS business can be solved with a MICRONICFAB.
There are also applications in the medical or pharmaceutics business possible.
The integrated robot is based on a building set to use it in vacuum, atmosphere, linearly moving or polar installed with a z-stroke from 20 up to 260 mm (10,2").