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The Micronicfab® is an automated group of modular protection chambers for the production of microstructures. The new concept has clear advantages over the classical Polar Cluster Tool Platform. Thus, it offers 40% space savings at 30% faster processing time! The system consists of one or more linear robots which are maneuverable in a tunnel under high vacuum conditions.Processing stations are latched onto the tunnel in linear arrangement. Thanks to the modular construction system consisting of few basic elements the Micronicfab® is very flexibly scalable. With the highest quality, reliability and precision the low number of components allows substantially easier and cheaper systems than with polar configured clusters. It allows the handling of both round and square substrates. In the semiconductor range wafer sizes of up to 450 mm for example can be traded.
German Version