At ASYS, our core competency is the handling of substrates in special isolated environmental conditions such as high vacuum or atmospheres of highest purity. Therefore we develop and sell robots and single parts as well as complete handling systems – the ASYS-Micronicfabs.
Our greatest asset is most definitely flexibility We provide our clients with individual solutions to cater their their needs. This is due to the fact that all our products are based on a combinable, open modular construction system. This means that every handling solution can be personally configured for each and every client. Thanks to our modular construction system we can offer highly individual solutions which can be developed at low cost. Our system also allows us to adjust the components to our client’s personal needs. In order to make this possible, the system is enhanced and consistenly maintained.
Ultra-high Vaccum Handling
Application example in ultra-high vacuum
ASYS has many years of experience in the field of UHV. By using surface finishing, specialty lubricants, substitution of temperature-sensitive materials and consequent avoidance of virtual leaks we can assure that our standard components combine to be UHV suitable robots.
Before assembly, all components are cleaned thoroughly from water and other superficial stains. In addition they are ventilated in a nitrogen atmosphere. All parts contributing to sealing the robot are tested on leakage several times. By using various sealing systems, the leakage can be reduced to a minimum.
This, in combination with the final cleaning and a metal packaging ensures a fast and clean system setup.
Handling under high-purity environmental conditions
Jumbo in EUV systems
ASYS is one of the pioneers in the field of High-Clean Handling. Taking into consideration the EUV lithography’s concepts, our robots have been developed for grease-free environments.
Our robots do not emit any sort of VOC (volatile organic compounds) while having a very small particle emission at the same time. This makes them suitable for VOC-sensitive environments and also for low-particle environments in which even tiny particles of 30nm can cause damage.
ASYS’ robots are even suitable for toxic or otherwise contaminated environments, as their sealing is monitored and guaranteed at all times.
